加热电流对六硼化镧阴极场发射特性影响研究

Study on the Effect of Heating Current on the Emission Characteristics of LaB6 Cold Cathode

  • 摘要: 与热阴极和肖特基阴极相比,场发射阴极有响应快、电流密度大、能散低等优势,但存在电流不稳定的缺点。在发射过程中保持高温是提升稳定性的一种有效方法,但温度升高也会改变冷阴极电子发射特性,因此研究不同加热电流对冷阴极发射特性的影响对于实际应用具有重要意义。采用聚焦等离子体刻蚀方法制备了六硼化镧纳米锥电子源,并在不同加热温度下对其发射特性进行了研究。通过COMSOL Multiphysics仿真获得了阴极在不同加热电流下的温度,并在不同的加热温度下开展了场发射实验研究,实验结果表明,随着加热电流增大,温度升高,场发射稳定性会显著提升。通过计算发现,由于本实验中最高加热电流对应的温度约为1000 K,其发射机制为场发射,从而仍然能保持低能散和高亮度。该工作将对获取稳定发射的高性能冷阴极点电子源起指导作用。

     

    Abstract: Compared with thermionic and Schottky cathodes, field emission cold cathodes have the advantages of fast response, high current density and low energy spread, which are beneficial for the high resolution and high signal-to-noise ratio for imaging. However, the emission current of cold cathode is not stable due to the varied surface caused by the gas adsorption and desorption. The varying surface with a varied work function results in a fluctuation and decay of the current and the only commercial tungsten field emission source still has a fluctuation of 5%/h and rapid decay of 20%/10 h even under a high vacuum of 10−9 Pa. Increasing operation temperature can reduce the adsorption of gases on the cathode surface. Maintaining high temperature during the emission process is an effective way to improve the stability, but higher operation temperature will also change the electron emission characteristics of cold cathode, such as an increasing the energy spread, so it is important to study the effect of different heating currents on the emission characteristics of cold cathode for practical applications. In this paper, a single-crystal LaB6 nanoneedle point electron source was fabricated by focused ion beam (FIB) milling, and its electron emission characteristics were investigated at different heating temperatures. Firstly, the temperatures of the cathode under different heating currents were obtained by COMSOL Multiphysics electro-thermal coupling simulation, and then the experimental study of the stability of the cold field emission current was carried out under different heating temperatures, and the experimental results showed that the field emission stability would be significantly improved with increasing heating current. Finally, theoretical calculations based on electron emission theory reveald that the highest heating current in this experiment corresponds to a temperature of about 1000 K. The emission mechanism is still field emission, and maintains low energy spread and high brightness. This work will serve as a guide for obtaining high-performance cold cathode point electron sources with stable emission.

     

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