TX1 800磁控溅射镀膜机冷却系统的改进

IMPROVEMENT IN COOLING SYSTEM OF TX1800 MAGNETRON FILM PLATING MACHINE

  • 摘要: 以北京天瑞星公司生产的大型TX1 800商用磁控溅射镀膜机为例,分析了磁控溅射镀膜机靶的结构及配套冷却系统,引入航空航天领域应用较多的层板发汗冷却。在高温下气化蒸发带走基材热量,达到材料降温的目的。通过层板间的特殊结构实现对流体流量、流速等的控制,实现预想的冷却效果。

     

    Abstract: In this paper,structure of the target and corresponding cooling-system,based on Beijing Tian Rui Xing company’s TX1800 magnetron sputtering film plating machine,are analyzed briefly.Then the conception of platelet &transpiration cooling which is used extensively in field of a-erospace is introduced briefly,on this basis,the cooling-system is redesigned,proposing a new improvement thought.

     

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