预加张力对电容薄膜真空计感压膜片变形的影响

孟岳; 陈叔平; 成永军; 孙雯君; 裴晓强; 贾春旺; 白彪坤; 金树峰

doi:10.3969/j.issn.1006-7086.2020.01.005

预加张力对电容薄膜真空计感压膜片变形的影响

1. 兰州理工大学石油化工学院, 兰州 730050;
2. 兰州空间技术物理研究所, 兰州 730000

详细信息

作者简介:
孟岳(1993-),男,河南孟津人,硕士研究生,主要从事真空低温技术领域的研究。E-mail:mengyue1004@126.com。

通讯作者:
陈叔平(1964-),男,浙江新昌人,教授,主要从事真空低温技术领域的研究。E-mail:chensp@lut.cn。

中图分类号: TB771
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出版历程
- 收稿日期: 2019-11-10
- 网络出版日期: 2023-07-05

Effect of Pre-Tension on Deformation of Capacitive Diaphragm Vacuum Gauge

1. College of Petrochemical Engineering, Lanzhou University of Technology, Lanzhou 730050, China;
2. Lanzhou Institute of Physics, Lanzhou 730000, China

摘要

摘要: 预加张力对电容薄膜真空计感压膜片变形的影响
- 电容薄膜真空计 ;
- 感压膜片 ;
- 预加张力 ;
- 挠度特性
Abstract: According to the uniform load-deflection behavior of the pressure sensing diaphragm of capacitive diaphragm vacuum gauge under pre-tension conditions, Von Karman equation and the Beams equation are selected as the theoretical model of the pressure sensing diaphragm. And the nonlinear finite element simulation analysis is carried out in combination with the static module in ANSYS Workbench software. The results show that the pre-tension has a significant effect on the deflection of the pressure sensing diaphragm. The deflection of the diaphragm decreases with the increase of the pre-tension. With the increase of the uniform load and the pre-tension, the decrease of deflection of the pressure sensing diaphragm is weakened. Under the same uniform load, the greater the pre-tension, the greater the influence ratio. When the uniform load increases and the deflection of the pressure sensing diaphragm increases, the deflection caused by the pre-tension is decreasing, and the influence ratio is gradually decreased. When the pressure sensing diaphragm is initially deformed by the 1 Pa uniform load, the pre-tension of 13 MPa has a 93% influence on the deflection of the diaphragm; when the uniform load exceeds 800 Pa, the deflection caused by the pre-tension is less than 35% of the deflection of the entire pressure sensing diaphragm; The uniform load is 1 000 Pa, and the pre-stress is 7 MPa, the influence ratio is 17.9%. The simulation results are verified by using the real capacitive diaphragm vacuum gauge.
- capacitive diaphragm vacuum gauge /
- pressure sensing diaphragm /
- pre-tension /
- deflection behavior

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参考文献(11)

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施引文献(6)

期刊类型引用(4)

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3.	贾春旺，陈叔平，成永军，孙雯君，裴晓强，孟岳，金树峰，杨雯，赵高逸. 感压膜片预张力对电容薄膜真空规输出特性的影响. 真空与低温. 2021(01): 52-56 . 本站查看
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