Abstract: Vanadium pentoxide films were deposited on quartz glass and silicon substrates using a vanadium target and pulse magnetron reactive sputter Ar/O₂ discharges at room temperature. The surface morphology and structural features were studied by XRD,XPS and AFM to ensure the growth of V₂O₅ films. Optical transmission and reflection characteristics were measured by spectroscopy from 200 nm to 2 500 nm wavelength region. The investigations revealed that V₂O₅ films were amorphous and optical band gap （Eg ）was about 2.46 eV.