比较法真空规校准装置性能研究

PERFORMANCE STUDY ON VACUUM GAUGE CALIBRATION SYSTEM WITH COMPARISON METHOD

  • 摘要: 比较法真空规校准装置是真空计量的主要工作标准,主标准器溯源到静态膨胀式真空标准装置。为了保证量值传递数据的准确可靠,对装置的不确定度进行了分析和评定,同时对装置的计量性能稳定性和重复性进行了测试和研究。

     

    Abstract: Vacuum gauge calibration system is the main standard in vacuun metrology area,which major component have traced to the static expansion vacuum standard.To ensure the credibility of calibration data,the uncertainties of calibration system were precisely estimated,and the repeatability and stability were also given.

     

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