复杂结构的大容器氦质谱检漏技术

HELIUM SPECTRUM LEAK DETECTING TECHNOLOGY FOR LARGE CHAMBER WITH COMPLEX CONSTRUCTION

  • 摘要: 叙述了复杂结构的大型真空容器氦质谱检漏应用技术,分析了其中存在的问题。提出应设置合适的检漏系统、适当降低检漏速度及对复杂部位进行局部检漏等方法

     

    Abstract: The helium mass spectrometer leak detecting technology for a large vacuum chamber with the complex construction is described.Some problems in operation are shown and analyzed.And solving methods are given to install suitable detecting systems and decelerate the detecting move and detect complex parts carefully.

     

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