上海EBIT装置低温超导段超高真空系统

UHV SYSTEM IN SHANGHAI EBIT CRYO-SUPERCONDUCTION CHAMBER

摘要: 介绍了上海电子束离子阱实验装置(EBIT)低温超导段常温和低温的真空获得系统设计,通过溅射离子泵和低温冷面的冷凝抽气系统达到了所需真空要求。系统的真空调试结果表明,常温下极限真空达到10^-6 Pa,液氦低温下在离子阱外围区域测量值是5×10^-8 Pa。离子阱区的压力是通过建立区域气体流动模型计算得到。结果预示,在离子捕集区真空度能达到10^-10 Pa的设计指标。

Abstract: The vacuum system design of Shanghai EBIT cryo-conduction segment is reported.Sputter ion pump and condensation surface are desirable to serve as pumping system.Vacuum system test results indicates ultimate pressure in outermost region achieve 10^-6 Pa in warm condition and 10^-8 Pa in cold condition.Pressure in the ion trap is evaluated by establishing gas flow model.It is predicated to be 10^-10 Pa that meet physical demands.