环境扫描电子显微镜中真空系统特点及成像信号分析

详细信息

VACUUM SYSTEM AND IMAGING SIGNAL IN ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE

Dept. of Precision Instruments, Hefei University of Technology, Hefei 230009, C hina

摘要: 环境扫描电子显微镜（ESEM）是针对常规扫描电子显微镜（SEM）在使用过程中暴露出来的一些重大缺陷而设计的。它淘汰了SEM中繁琐、复杂的样品准备工作，扩大了仪器的使用范围，并使图像更清晰。着重介绍了ESEM的工作原理、与此有关的真空系统构成及成像信号分析。
- 环境扫描电子显微镜 ;
- 扫描电子显微镜 ;
- 成像信号
Abstract: Environmental Scanning Electron Microscope（ESEM）is designed to imp rove the capability of conventional Scanning Electron Microscope （SEM）.It eliminates the most trivial and complex sample preparation needed in SEM and extends the range of the application of the instrument. It can also provide the clear and natural image of the sample. The principle of ESEM, the vacuum system used in E SEM and its imaging signal are introduced.
- environmental scanning electron microscope /
- scanning electron micro scope /
- imaging signal