四极质谱计在高压力下的测量方法

METHOD OF MEASUREMENT IN HIGH PRESSURE BY QUADRUPOLE MASS SPECTROMETER

摘要: 四极质谱计是一种分压力测量仪器,其线性上限一般为10^-3Pa。通过对影响四极质谱计测量上限的因素进行分析,得到高压力下的分压力计算方法,并通过实验验证了该方法的可行性,得出的结论对高压力下四极质谱计的应用具有一定的参考价值。

Abstract: The quadrupole mass spectrometer is an instrument for partial pressure measurement.It’s upper limit of linearity is about 10^-3 Pa.The factors which influence the upper limit of linearity and find the method to calculate the partial pressure in high pressure are analyzed.The method was proved to be right by some experiments and the conclusions have reference value for the use of quadrupole mass spectrometer.