真空规原位置校准装置

DEVELOPMENT OF AN IN SITU VACUUM GAUGE CALIBRATION SYSTEM

摘要: 介绍了一种真空规原位置校准的设备,以及原位置校准技术研究,该装置具有结构简单、实用、不确定度小等优点,同时可以满足真空规的在线原位校准。

Abstract: An in situ vacuum gauge calibration system is described together with its calibration technology.The system possesses simple structure,practicality and small uncertainty,which can settle for in situ vacuum gauge calibration.