变角XPS定量分析的研究

详细信息

STUDY OF COMPOSITION/DEPTH ANALYSIS TECHNIQUE BY ANGULAR DEPENDENT XPS

School of Electron Engineer and Photoelectron Technology,Nanjing)(University of Science and Technology,Nanjing 210094

摘要: 综述了变角X射线光电子能谱(XPS)分析表面的原理和计算方法,获得了变角XPS分析表面/深度的定量计算程序,可快速可靠地计算多层多种组分的含量和层厚度。
- 变角XPS ;
- 层结构 ;
- 组分 ;
- 厚度
Abstract: The theory and methods of the composition dependence on depth of surface by angular-dependent X-ray photoelectron spectroscopy(XPS)have been summarized.The quantitative calculating programs were achieved,which could calculate quickly and reliably chemical compositions and layer thickness of multi-layer structure surface.
- angular-dependent XPS /
- surface layer structure /
- composition /
- thickness