分压力质谱计校准装置的性能测试及校准实验

EXPERIMENTAL STUDY ON CALIBRATION SYSTEM OF MASS SPECTROMETERS FOR PARTIAL PRESSURE

  • 摘要: 介绍了分压力质谱计校准装置的性能指标,并用分压力质谱计校准装置校准了一台四极质谱计,给出了灵敏度、图样系数、线性、质量刻度、分辨本领等校准结果,还研究了气体之间的相互影响。

     

    Abstract: The technical specifications of the calibration system of mass spectrometers for partial pressure were introduced,and a quadrupole mass spectrometer was calibrated by this calitration system.The calibration results including sensitivity,fragmentation factor,linearity,mass scale and resolving power are presented.In addition,the influences between gases were studied.

     

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