磁控溅射MoS2/Sb2O3复合膜的润滑失效分析
ANALYSES ON THE FAILURE OF MAGNETIC SPUTTERING MoS2/Sb2O3 COMPOSITE FILMS
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磁控溅射法制备了MoS2/Sb2O3固体润滑复合膜,用CSEM摩擦试验机、CSEM纳米划痕仪和PHI-5 70 2XPS/AES多功能电子能谱仪,考察了其摩擦磨损性能、抗损伤性能和抗氧化性能,侧重分析了薄膜失效的原因,探讨了该固体润滑复合膜润滑失效的微观机理。Abstract: The MoS2/Sb2O3 composite films have been prepared by the magnetic sputtering deposition method.Their tribologicol performance,mar resistance and oxidation resistance have been investigated respectively by means of CSEM tribometer,CSEM nano-scratch tester and PHI-5702XPS/AES multifunction electron spectrometer.The detailed analyses have been made on the failure of the films. The lubricating failure mechanism of the films has been researched.
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