LiNbO3压电薄膜的研究进展
THE RESEARCH PROGRESS OF LINBO3 PIEZOELECTRIC THIN FILMS
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摘要: LiNbO3因其优异的压电性能和声表面波特性而被广泛应用于声表面波器件中。对LiNbO3的声表面波特性及薄膜制备技术进行了综述,并着重介绍了LiNbO3/蓝宝石及LiNbO3/金刚石多层结构的制备、声表面波特性的理论研究及压电薄膜研究进展。Abstract: LiNbO3 have many applications in SAW devices due to its excellent piezoelectric and surface acoustic wave properties.This paper gives emphasis on the structure,surface acoustic wave properties and fabrication of LiNbO3 thin films.Finally,the research progresses of LiNbO3/sapphire and LiNbO3/diamond structures in the field of surface acoustic wave were reviewed.
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