定容式气体微流量计的测量误差分析

ERROR ANALYSIS OF MEASUREMENT OF CONSTANT VOLUME FLOWMETER

摘要: 从原理上对定容式气体微流量计(CVFM)和带参考室的CVFM的流量测量误差进行了理论分析。测量过程中温度变化对CVFM的流量测量误差作用较大,是影响CVFM测量下限的一个主要因素。为CVFM增加一个参考室,可以减少测量过程中温度变化对CVFM的流量测量误差的贡献。

Abstract: The errors of measurement of CVFM and CVFM with a reference chamber were analyzed in the paper.The variation of temperature in the measurement process is one of main factors which influencing the error of measurement and the lower limit of measurement.With a reference chamber,the error of measurement contributed by the variation of temperature can be reduced.