Review of Thin Film Temperature and Strain Sensor Technologies for Spacecraft

MA Dongfeng; XIONG Yuqing; HE Yanchun; ZHANG Kaifeng; CAO Shengzhu

doi:10.12446/j.issn.1006-7086.2024.01.002

VACUUM AND CRYOGENICS > 2024 > 30(1): 10-22. > DOI: 10.12446/j.issn.1006-7086.2024.01.002

MA Dongfeng, XIONG Yuqing, HE Yanchun, et al. Review of Thin Film Temperature and Strain Sensor Technologies for Spacecraft[J]. VACUUM AND CRYOGENICS, 2024, 30(1): 10-22. DOI: 10.12446/j.issn.1006-7086.2024.01.002

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Review of Thin Film Temperature and Strain Sensor Technologies for Spacecraft

Science and Technology in Vacuum Technology and Physics Laboratory，Lanzhou Institute of Physics，Lanzhou　730000，China

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Received Date: August 31, 2023
Available Online: December 24, 2023

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Abstract

Abstract

With the increasing maturity of thin film preparation methods and micro-machining technologies, thin film sensor technologies based on various thin film sensitive elements are experiencing significant development. The advantages of small size, high integration, and high sensitivity of thin film sensors make them show excellent prospects for aerospace applications such as deep space exploration, spacecraft structural health monitoring, manned spaceflight, etc. In this paper, thin film temperature sensing and strain sensing technologies were discussed. According to different sensing applications in spacecraft, the key technologies and research status of thin film sensing materials and devices in cryogenic/high temperature measurement, heat flux sensing, strain sensing at high temperature, and flexible large strain sensing, flexible intelligent skin are reviewed. Finally, the developing trends of thin film sensors are prospected.
- thin film sensors,
- temperature sensing,
- strain sensing,
- smart skin

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References (50)

References

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