Low Pressure Gas Sensing Techniques Based on Carbon Nanotube-metal Schottky Contacts

HUANG Chuntian; YE Nini; SHAO Hezhu; FANG Chaolong; DONG Changkun

doi:10.12446/j.issn.1006-7086.2024.06.004

VACUUM AND CRYOGENICS > 2024 > 30(6): 623-628. > DOI: 10.12446/j.issn.1006-7086.2024.06.004

HUANG C T，YE N N，SHAO H Z，et al. Low pressure gas sensing techniques based on carbon nanotube-metal Schottky contacts[J]. Vacuum and Cryogenics，2024，30（6）：623−628. DOI: 10.12446/j.issn.1006-7086.2024.06.004

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Low Pressure Gas Sensing Techniques Based on Carbon Nanotube-metal Schottky Contacts

Wenzhou Key Lab of Micro-Nano Optoelectronic Devices，Wenzhou University，Wenzhou　325035，Zhejiang，China

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Received Date: May 05, 2024

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Abstract

Abstract

Carbon nanotube （CNT） has unique structure and excellent physical property. It can be used potentially in gas sensing due to gas adsorptions in CNT-metal contact. The CNT-FET and CNT/Au resistance sensors based on the CNT-metal Schottky junction were constructed by the lift-off and dielectrophoretic （DEP） processes. The sensing performances of two devices were tested for hydrogen and nitrogen gases in low pressure range of 10⁻⁷~10⁻⁵ Pa. The currents of CNT-FET and CNT/Au resistance sensors increased 0.05 μA and 0.14 μA, respectively, which exhibit similar hydrogen sensing performance. The research results have explored a new approach of low pressure sensing.
- carbon nanotube,
- Schottky barrier,
- gas sensing,
- work function

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References (23)

References

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