STUDY ON METROLOGICAL CHARACTERISTIC OF MINIATURE CAPACITANCE DIAPHRAGM VACUUM GAUGE FOR MARS EXPLORATION

Commercial capacitance diaphragm vacuum gauge cannot meet the requirement for vacuum measurement in deep space exploration.The miniature capacitance diaphragm gauge has been designed.The linearity、stability and repeatability of miniature capacitance diaphragm vacuum gauge has been studied on the static expansion vacuum standard equipment.The results show that the metrological characteristic of the miniature capacitance diaphragm gauge can meet the mars exploration needs.