PRESSURE ANALYSIS OF OPEN TYPE LIQUID-NITROGEN CRYOPUMP
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Graphical Abstract
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Abstract
The structure design of a cryopump which is used in plasma stealth system is introduced briefly.The pressure analysis scheme of the pump with flow continuity equation and computational fluid dynamics method is established.The analysis results indicate that axial pressure drop of the pump is mainly occurred near the orifice and the orifice has optimal size.The results guide optimization of cryopump structure and follow-up thermodynamics analysis.
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