DYSFUNCTION ANALYSIS AND MITIGATION SOLUTION OF CRYOPUMP SYSTEM

Cryopump system provides vacuum environment needed and is mainly used in nuclear industry, aviation industry and space industry, especially in national large science and technology projects such as manned spaceflights, launch vehicles, large acceleraters and space payloads, etc.. This paper summarize the failure causes and debugging methods of the cryopump system in operation, and will provide reference for failure analysis and elimination, equipment maintenance during cryopump system operations.