Design and Analysis of a New Type MEMS Capacitance Vacuum Pressure Sensor
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Graphical Abstract
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Abstract
In order to stretch measurement range and enhance the anti-overload capacity of MEMS capacitive vacuum sensor,a new island-like bottom electrode has been designed.Using finite element analysis (FEA) method to compare the relationship between pressure and deflection,pressure and capacitance,pressure and maximum stress,respectively.This new-type electrode has superb sensitivity in low pressure,better linearity and stronger anti-overload than normal structure,which could donate some references for the following manufacture process of MEMS vacuum sensor.
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