STUDY OF PREPARING ULTRA-THIN Pt HEAT-SENSITIVE FILM ON POLYIMIDE AT LOW-TEMPERATURE

The temperature of accidented and curved surface can be real-time supervised and tested by preparing heat-sensitive thin film on polymer substrate.Ultra-thin Pt heat-sensitive film was prepared with pulsed laser deposition on polyimide substrate at lower temperature（～250 ℃）.The resistance-temperature coefficient of the Pt thin film is 1.01×10^-3 /K.The resistance-temperature coefficient of the Pt thin film increases to 1.55×10^-3 /K by preparing ZnO thin film before preparing Pt thin film with pulsed laser deposition on polyimide substrate.