LIU Yu-ping, CHEN Feng, GUO Ai-bo, et al. PREPARATION AND APPLICATION OF TRANSPARENT CONDUCTIVE AZO THIN FILM[J]. VACUUM AND CRYOGENICS, 2007, 13(1): 1-5,20.
Citation:
LIU Yu-ping, CHEN Feng, GUO Ai-bo, et al. PREPARATION AND APPLICATION OF TRANSPARENT CONDUCTIVE AZO THIN FILM[J]. VACUUM AND CRYOGENICS, 2007, 13(1): 1-5,20.
LIU Yu-ping, CHEN Feng, GUO Ai-bo, et al. PREPARATION AND APPLICATION OF TRANSPARENT CONDUCTIVE AZO THIN FILM[J]. VACUUM AND CRYOGENICS, 2007, 13(1): 1-5,20.
Citation:
LIU Yu-ping, CHEN Feng, GUO Ai-bo, et al. PREPARATION AND APPLICATION OF TRANSPARENT CONDUCTIVE AZO THIN FILM[J]. VACUUM AND CRYOGENICS, 2007, 13(1): 1-5,20.
PREPARATION AND APPLICATION OF TRANSPARENT CONDUCTIVE AZO THIN FILM
The multiform preparation technologies and applications developments on AZO thin film are described.The current research status of magnetron sputtering,sol-gel,Pulsed laser deposition,vacuum evaporating and chemical-vapor deposition techniques applied in the preparation of AZO thin film is introduced in detail.The industrialization for AZO films in the future is more promiseful than ITO thin film.
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