MASK DESIGN FOR LINEAR VARIABLE FILTERS

QIN Jie-yu, LUO Chong-tai, MA Mian-jun. MASK DESIGN FOR LINEAR VARIABLE FILTERS[J]. VACUUM AND CRYOGENICS, 2007, 13(1): 57-62.

Citation:

QIN Jie-yu, LUO Chong-tai, MA Mian-jun. MASK DESIGN FOR LINEAR VARIABLE FILTERS[J]. VACUUM AND CRYOGENICS, 2007, 13(1): 57-62.

Citation:

QIN Jie-yu, LUO Chong-tai, MA Mian-jun. MASK DESIGN FOR LINEAR VARIABLE FILTERS[J]. VACUUM AND CRYOGENICS, 2007, 13(1): 57-62.

Abstract

A method of mask for adjusting the thin film thickness design was described.Relation between the film thickness on the substrates and that on the chips was analyzed when a mask is used.The mask for linear variable filters was designed.Some linear variable filters were successfully fabricated and the results were given.

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