VACUUM SYSTEM AND IMAGING SIGNAL IN ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE

Environmental Scanning Electron Microscope（ESEM）is designed to imp rove the capability of conventional Scanning Electron Microscope （SEM）.It eliminates the most trivial and complex sample preparation needed in SEM and extends the range of the application of the instrument. It can also provide the clear and natural image of the sample. The principle of ESEM, the vacuum system used in E SEM and its imaging signal are introduced.