DEVELOPMENT OF RESEARCHES ON HETEROEPITAXY DIAMOND FILMS

WANG Chuan-xin; WANG Jian-hua; MAN Wei-dong; MA Zhi-bin; WANG Sheng-gao; KANG Zhi-cheng

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VACUUM AND CRYOGENICS > 2002 > 8(2): 71-76.

WANG Chuan-xin, WANG Jian-hua, MAN Wei-dong, et al. DEVELOPMENT OF RESEARCHES ON HETEROEPITAXY DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(2): 71-76.

Citation:

WANG Chuan-xin, WANG Jian-hua, MAN Wei-dong, et al. DEVELOPMENT OF RESEARCHES ON HETEROEPITAXY DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(2): 71-76.

Citation:

WANG Chuan-xin, WANG Jian-hua, MAN Wei-dong, et al. DEVELOPMENT OF RESEARCHES ON HETEROEPITAXY DIAMOND FILMS[J]. VACUUM AND CRYOGENICS, 2002, 8(2): 71-76.

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DEVELOPMENT OF RESEARCHES ON HETEROEPITAXY DIAMOND FILMS

1. The institute of plasma Physics, Chinese Academy of Sciences, Hefei 230031, China;
2. Department of Material Science and Engineering, Wuhan institute of Chemical Technology, Wuhan 430073, China

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Received Date: December 20, 2001

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The status in the researches on synthesizing heteroepitaxial diamond thin films on silicon is introduced. Bias enhanced nucleation,action of SiC in film deposition and effect of different parameters on qualities of heteroepitaxial are summarized.Some problems that worth further researches in this field are presented.
- diamond thin films,
- heteroepitaxy,
- CVD

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DEVELOPMENT OF RESEARCHES ON HETEROEPITAXY DIAMOND FILMS

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