VANADIUM DIOXIDE THIN FILMS DEPOSITED BY MAGNETRON SPUTTERING AND ITS PHASE TRANSITION INDUCED BY ELECTRIC-FIELD

vanadium dioxide thin films on fused quartz glass have been prepared directly by reactive magnetron sputtering methods.The electrodes were fabricated on the thin films using well-established semiconductor techniques,and an abrupt semiconductor-metal phase transition（SMPT） was observed in vanadium thin films when a static voltage applied onto the electrodes.