THE DEVELOPMENT OF AN ANALYSIS EQUIPMENT WITH MULTIPLE SHOWING GAS SUTABLE FOR LEAK DETECTING IN ATMOSPHERE

This paper describes the structure, working theory, design scheme, experiment method and experiment results of a multiple showing gas leak detection equipment consisting mainly of quadrupole mass spectrum, which s suitable for leak detecting in atmosphere.It can detrct He at the concentration of 1×10 ^-9,Ne at the concentration of 2×10 ^-7,and CF₄ at the concentration of 1×10 ^-9.