Cai Chun. Numercal calculation accelerative field of designig ionized clusterbeam device[J]. VACUUM AND CRYOGENICS, 1994, 13(1): 33-37.
Citation: Cai Chun. Numercal calculation accelerative field of designig ionized clusterbeam device[J]. VACUUM AND CRYOGENICS, 1994, 13(1): 33-37.

Numercal calculation accelerative field of designig ionized clusterbeam device

  • A important part in the ionized cluster beam device is adjust-able accelerative field.The technological characteristic increase migration and adhesion of depositing material in the substrate。This paper give emphasis to indroduce numerical calculation of accelerative field of designing ionized cluster beam device, in case of no increasing investment,we elect a useful,feasible ionized cluster beam device.
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