REFERENCE LEAK CALIBRATION WITH GAS FLOW STANDARD APPARATUS

Zhang Dixin, Lü Shiliang, Li Detian, et al. REFERENCE LEAK CALIBRATION WITH GAS FLOW STANDARD APPARATUS[J]. VACUUM AND CRYOGENICS, 1996, 2(2): 68-72.

Citation:

Zhang Dixin, Lü Shiliang, Li Detian, et al. REFERENCE LEAK CALIBRATION WITH GAS FLOW STANDARD APPARATUS[J]. VACUUM AND CRYOGENICS, 1996, 2(2): 68-72.

Citation:

Zhang Dixin, Lü Shiliang, Li Detian, et al. REFERENCE LEAK CALIBRATION WITH GAS FLOW STANDARD APPARATUS[J]. VACUUM AND CRYOGENICS, 1996, 2(2): 68-72.

Abstract

In this paper,two leak calibration methods, the measurement method and the directmethod. are described.The results of leak calibration are given. By gas flow standard apparatus, thereference leak in 17~1×10^-5 Pa·L/s range can be calibrated with uncertainty less than 2%.

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