A PUMPING SPEED MEASUREMENT APPARATUS FOR THE LARGE Ti-FILM GETTER PUMP

Li Gaoyun. A PUMPING SPEED MEASUREMENT APPARATUS FOR THE LARGE Ti-FILM GETTER PUMPJ. VACUUM AND CRYOGENICS, 1995, 1(1): 2-4.

Citation:

Li Gaoyun. A PUMPING SPEED MEASUREMENT APPARATUS FOR THE LARGE Ti-FILM GETTER PUMPJ. VACUUM AND CRYOGENICS, 1995, 1(1): 2-4.

Citation:

Li Gaoyun. A PUMPING SPEED MEASUREMENT APPARATUS FOR THE LARGE Ti-FILM GETTER PUMPJ. VACUUM AND CRYOGENICS, 1995, 1(1): 2-4.

Abstract

This paper describs a pumping speed measurement method for the 2×10⁵L/s Titanium sublimation pump,Its experiment principle and measurement apparatus are mentioned.

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