ZHAO Yi-hong, CHEN Rong-fa, WANG Mao-xiang. TECHNOLOGY STUDY ON FERROELECTRIC PROPERTIES OF (Pb1-xSrx)TiO3 FILM[J]. VACUUM AND CRYOGENICS, 2004, 10(4): 205-210.
Citation: ZHAO Yi-hong, CHEN Rong-fa, WANG Mao-xiang. TECHNOLOGY STUDY ON FERROELECTRIC PROPERTIES OF (Pb1-xSrx)TiO3 FILM[J]. VACUUM AND CRYOGENICS, 2004, 10(4): 205-210.

TECHNOLOGY STUDY ON FERROELECTRIC PROPERTIES OF (Pb1-xSrx)TiO3 FILM

  • (Pb1-xSrx)TiO3 (PST) film, as an important ferroelectric film, has become an extensively studied subject of much basic and technological interest. The PST ferroelectric films were fabricated by magnetron sputtering. The problems of technology connected with ferroelectric properties of PST films have been analysised particularly. The results showed that the PST thin films would possess the perovskite phase and excellent ferroelectric properties with proper technology.
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