CHARACTERIZATION OF MICRO-MECHANICAL SILICON ACCELEROMETER

HE Ling, XUE Da-tong. CHARACTERIZATION OF MICRO-MECHANICAL SILICON ACCELEROMETER[J]. VACUUM AND CRYOGENICS, 2003, 9(2): 63-70.

Citation:

HE Ling, XUE Da-tong. CHARACTERIZATION OF MICRO-MECHANICAL SILICON ACCELEROMETER[J]. VACUUM AND CRYOGENICS, 2003, 9(2): 63-70.

Citation:

HE Ling, XUE Da-tong. CHARACTERIZATION OF MICRO-MECHANICAL SILICON ACCELEROMETER[J]. VACUUM AND CRYOGENICS, 2003, 9(2): 63-70.

Abstract

The basical principles and characterizations of micro mechanical silicon accelerometer are introduced. The design project of high precision silicon accelerometer is presented by comparing various silicon accelerometers.

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