PREPARATION AND APPLICATION OF SiO<sub>2</sub> THIN FILMS

WANG Yong-zhen, GONG Guo-quan, CUI Jing-zhong. PREPARATION AND APPLICATION OF SiO2 THIN FILMS[J]. VACUUM AND CRYOGENICS, 2003, 9(4): 228-233.

Citation:

WANG Yong-zhen, GONG Guo-quan, CUI Jing-zhong. PREPARATION AND APPLICATION OF SiO2 THIN FILMS[J]. VACUUM AND CRYOGENICS, 2003, 9(4): 228-233.

Citation:

WANG Yong-zhen, GONG Guo-quan, CUI Jing-zhong. PREPARATION AND APPLICATION OF SiO2 THIN FILMS[J]. VACUUM AND CRYOGENICS, 2003, 9(4): 228-233.

PREPARATION AND APPLICATION OF SiO₂ THIN FILMS

Abstract

SiO₂ thin films have the many excellent properties such as hardness, optical,dielectric properties, wear-resistance and corrosion-resistance. It has been widely used in optical and microelectronic applications. The preparation methods, properties and applications of SiO₂ thin films are discussed.

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