The study and properties of S-gun magnetic control spatter source

Yang zhanwen, Li zipeng, Liu Fuxia. The study and properties of S-gun magnetic control spatter source[J]. VACUUM AND CRYOGENICS, 1994, 13(1): 29-33.

Citation:

Yang zhanwen, Li zipeng, Liu Fuxia. The study and properties of S-gun magnetic control spatter source[J]. VACUUM AND CRYOGENICS, 1994, 13(1): 29-33.

Citation:

Yang zhanwen, Li zipeng, Liu Fuxia. The study and properties of S-gun magnetic control spatter source[J]. VACUUM AND CRYOGENICS, 1994, 13(1): 29-33.

Abstract

S-gun is a kind of advanced vacuum spatter coating devices It can be used to carry on many vacuum coating technology.This article introduces the study of structure state and operation propertics of S-gun.

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