COMPARISON METHOD CALIBRATION APPARATUS OF ULTRA-HIGH VACUMM

LI Zheng-hai. COMPARISON METHOD CALIBRATION APPARATUS OF ULTRA-HIGH VACUMM[J]. VACUUM AND CRYOGENICS, 2009, 15(1): 45-47.

Citation:

LI Zheng-hai. COMPARISON METHOD CALIBRATION APPARATUS OF ULTRA-HIGH VACUMM[J]. VACUUM AND CRYOGENICS, 2009, 15(1): 45-47.

Citation:

LI Zheng-hai. COMPARISON METHOD CALIBRATION APPARATUS OF ULTRA-HIGH VACUMM[J]. VACUUM AND CRYOGENICS, 2009, 15(1): 45-47.

Abstract

A kind of comparison method calibration apparatus of ultra-high vacuum is introduced,which has the advantages of simplicity,practicality and small uncertainty.This apparatus can calibrate ultra-high vacuum gauge in the 10^-7～10^-5 Pa range.

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