WANG Guihua, YANG Weiyi, CHANG Benkang. STUDY OF COMPOSITION/DEPTH ANALYSIS TECHNIQUE BY ANGULAR DEPENDENT XPS[J]. VACUUM AND CRYOGENICS, 1999, 5(4): 242-245.
Citation:
WANG Guihua, YANG Weiyi, CHANG Benkang. STUDY OF COMPOSITION/DEPTH ANALYSIS TECHNIQUE BY ANGULAR DEPENDENT XPS[J]. VACUUM AND CRYOGENICS, 1999, 5(4): 242-245.
WANG Guihua, YANG Weiyi, CHANG Benkang. STUDY OF COMPOSITION/DEPTH ANALYSIS TECHNIQUE BY ANGULAR DEPENDENT XPS[J]. VACUUM AND CRYOGENICS, 1999, 5(4): 242-245.
Citation:
WANG Guihua, YANG Weiyi, CHANG Benkang. STUDY OF COMPOSITION/DEPTH ANALYSIS TECHNIQUE BY ANGULAR DEPENDENT XPS[J]. VACUUM AND CRYOGENICS, 1999, 5(4): 242-245.
STUDY OF COMPOSITION/DEPTH ANALYSIS TECHNIQUE BY ANGULAR DEPENDENT XPS
The theory and methods of the composition dependence on depth of surface by angular-dependent X-ray photoelectron spectroscopy(XPS)have been summarized.The quantitative calculating programs were achieved,which could calculate quickly and reliably chemical compositions and layer thickness of multi-layer structure surface.
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