DIAMOND FILMS SYNTHESIS BESIDE THE ARC JET

WANG Shouguo, WU Qinchong, XIE Jikang. DIAMOND FILMS SYNTHESIS BESIDE THE ARC JET[J]. VACUUM AND CRYOGENICS, 1998, 4(4): 217-219.

Citation:

WANG Shouguo, WU Qinchong, XIE Jikang. DIAMOND FILMS SYNTHESIS BESIDE THE ARC JET[J]. VACUUM AND CRYOGENICS, 1998, 4(4): 217-219.

Citation:

WANG Shouguo, WU Qinchong, XIE Jikang. DIAMOND FILMS SYNTHESIS BESIDE THE ARC JET[J]. VACUUM AND CRYOGENICS, 1998, 4(4): 217-219.

Abstract

Diamond films were synthesized by using a magnetized DC plasma jet with argon（Ar）,hydrogen（H ₂） and methane（CH ₄） on AlN substrate without water cooling.The feature,growth rate and quality of the films were studied by scanning elactron microscopy,X ray diffration and Raman spectroscopy.

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