DEVELOPMENT OF CVD AND PVD SUPERHARD COATINGS

YU Shiji, DING Zhenfeng, LIU Dongping, et al. DEVELOPMENT OF CVD AND PVD SUPERHARD COATINGSJ. VACUUM AND CRYOGENICS, 1999, 5(3): 157-161,166.

Citation:

YU Shiji, DING Zhenfeng, LIU Dongping, et al. DEVELOPMENT OF CVD AND PVD SUPERHARD COATINGSJ. VACUUM AND CRYOGENICS, 1999, 5(3): 157-161,166.

Citation:

YU Shiji, DING Zhenfeng, LIU Dongping, et al. DEVELOPMENT OF CVD AND PVD SUPERHARD COATINGSJ. VACUUM AND CRYOGENICS, 1999, 5(3): 157-161,166.

Abstract

n this paper some recent developments of the superhard coatings of diamond、diamond-like carbon（DLC）,C-BN and C-N were summarized,the researchs on four superhard coationgs preparation were emphatically introduced.

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