REQUIREMENT AND DEVELOPMENT OF VACUUM METROLOGY

ZHANG Di-xin. REQUIREMENT AND DEVELOPMENT OF VACUUM METROLOGY[J]. VACUUM AND CRYOGENICS, 2007, 13(3): 125-127.

Citation:

ZHANG Di-xin. REQUIREMENT AND DEVELOPMENT OF VACUUM METROLOGY[J]. VACUUM AND CRYOGENICS, 2007, 13(3): 125-127.

Citation:

ZHANG Di-xin. REQUIREMENT AND DEVELOPMENT OF VACUUM METROLOGY[J]. VACUUM AND CRYOGENICS, 2007, 13(3): 125-127.

Abstract

The requirement and development of vacuum metrology are summarized.The requirements for the total/partial pressure,gas micro-flow,vacuum measurement of space/special condition,as well as requirements for vacuum metrology standards and test equipment are included.

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