STUDY ON COLOR INFLUENCING REGULATION OF NITROGEN PARTIAL PRESSURE ON ZIRCONIUM NITRIDE FILMS

The QMS200 Mass Spectrometer is taken to monitoring the gas in the process of filming. Auger electron spectroscopy is used to analyze the relation between the Nitrogen Partial Pressure and the Nitrogen content in the film. By measuring the Zr-N film, the relation between Nitrogen Partial Pressure and the color of the film is found.