ANALYTICAL METHOD CALCULATION AND MONTE CARLO CALCULATION OF THE ORIFICE CONDUCTANCE

In this paper,different methods,based both on analytical consideration and on the Monte Carlo evaluation were applied to the calculation of the correction factor of the conductance of the orifice of the continuous gas expansion calibration system and XHV/UHV calibration system.The transmission probability is calculated.The standard uncertainty of the results calculated by Monte Carlo method are between 4.5×10^-7 and 1.1×10^-5.