CHARACTERIZATION OF VANADIUM DIOXIDE THIN FILMS BY ANNEALING

Vanadium dioxide thin films on quartz glass have been prepared by reactive magnetron sputtering methods and annealingprocess.Structural and electrical-optical properties have been characterized by XRD,SEM,resistance measurements and optics transmittance measurements in wavelength between 200～2 500 nm.Influence of annealing on thin film properties was given.