ZHAO Yin-zhong, WANG Jie-bing, QIU Jia-wen, et al. REACTIVE SPUTTERING OF INDIUM TIN OXIDE THIN FILMS USING AC TWIN\|TARGET[J]. VACUUM AND CRYOGENICS, 2003, 9(1): 13-16.
Citation:
ZHAO Yin-zhong, WANG Jie-bing, QIU Jia-wen, et al. REACTIVE SPUTTERING OF INDIUM TIN OXIDE THIN FILMS USING AC TWIN\|TARGET[J]. VACUUM AND CRYOGENICS, 2003, 9(1): 13-16.
ZHAO Yin-zhong, WANG Jie-bing, QIU Jia-wen, et al. REACTIVE SPUTTERING OF INDIUM TIN OXIDE THIN FILMS USING AC TWIN\|TARGET[J]. VACUUM AND CRYOGENICS, 2003, 9(1): 13-16.
Citation:
ZHAO Yin-zhong, WANG Jie-bing, QIU Jia-wen, et al. REACTIVE SPUTTERING OF INDIUM TIN OXIDE THIN FILMS USING AC TWIN\|TARGET[J]. VACUUM AND CRYOGENICS, 2003, 9(1): 13-16.
REACTIVE SPUTTERING OF INDIUM TIN OXIDE THIN FILMS USING AC TWIN\|TARGET
Thin films of indium tin oxide have been prepared by AC Twin target reactive sputtering from indium tin oxide ceramics targets. The optical transmittance of samples exceeds 85%. The effect of technics parameters on the properties of indium tin oxide thin films has been studied.
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