RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS

HUANG Liang-fu; JIA Fu-yun

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VACUUM AND CRYOGENICS > 2002 > 8(4): 187-196.

HUANG Liang-fu, JIA Fu-yun. RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS[J]. VACUUM AND CRYOGENICS, 2002, 8(4): 187-196.

Citation:

HUANG Liang-fu, JIA Fu-yun. RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS[J]. VACUUM AND CRYOGENICS, 2002, 8(4): 187-196.

Citation:

HUANG Liang-fu, JIA Fu-yun. RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS[J]. VACUUM AND CRYOGENICS, 2002, 8(4): 187-196.

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RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS

Lanzhou Institute of Physics, Lanzhou 730000, China

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Received Date: August 01, 2002

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The basal principles and space applictions of Micro Mechanical Systems are introduced. The detailed status in the research and development of micro sensors, micro actuators, RF-MEMS, MOSEMS, micro devices and micro/nano satellites are presented.
- Micro Electro Mechanical Systems,
- microsats,
- space application

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RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS

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