LI Zhong-hua, WANG Jing-yi, WANG Yun-fei, et al. DEVELOPMENT OF LARGE AREA PLASMA POLYMERIZATION FACILITY[J]. VACUUM AND CRYOGENICS, 2004, 10(1): 36-38.
Citation:
LI Zhong-hua, WANG Jing-yi, WANG Yun-fei, et al. DEVELOPMENT OF LARGE AREA PLASMA POLYMERIZATION FACILITY[J]. VACUUM AND CRYOGENICS, 2004, 10(1): 36-38.
LI Zhong-hua, WANG Jing-yi, WANG Yun-fei, et al. DEVELOPMENT OF LARGE AREA PLASMA POLYMERIZATION FACILITY[J]. VACUUM AND CRYOGENICS, 2004, 10(1): 36-38.
Citation:
LI Zhong-hua, WANG Jing-yi, WANG Yun-fei, et al. DEVELOPMENT OF LARGE AREA PLASMA POLYMERIZATION FACILITY[J]. VACUUM AND CRYOGENICS, 2004, 10(1): 36-38.
DEVELOPMENT OF LARGE AREA PLASMA POLYMERIZATION FACILITY
Large area plasma polymerization has been carried out by installing a set of convolution framework in the RF plasma polymerization facility. The width of film reaches to 200 mm. The velocity can be adjusted in the range of 0.01～5.00 mm/s. The film can be moved in positive direction and in reverse.
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