PREPARATION AND PHOTOCATALYTIC ACTIVITY STUDIES OF ANATASE-PHASED TiO₂ THIN FILMS

TiO₂ thin films were deposited by direct c urrent （dc）magnetron reactive sputtering with out external heat-ing.The films were investigated using X -ray diffraction（XRD）and X -ray photoelectron spectroscopy（XPS）.The photo-catalysis activity of the samples wa s tested on the degradation of methylene blue solution under the irradiation of UV lamp.The results show that when annealed betw een 400℃and 500℃for two hours,the am orphous TiO 2 films change to anatase phase.Anatase -phased TiO₂ films show photocatalysis property and the thicker samples annealed at 500℃have better photocatalysis activity.