NEW ACHIEVEMENT IN THE FIELD OF TECHNOLOGY ABOUT COATED GLASS WITH MAGNETRON SPUTTERING

CHEN Xiaodong. NEW ACHIEVEMENT IN THE FIELD OF TECHNOLOGY ABOUT COATED GLASS WITH MAGNETRON SPUTTERINGJ. VACUUM AND CRYOGENICS, 1999, 5(4): 229-232.

Citation:

CHEN Xiaodong. NEW ACHIEVEMENT IN THE FIELD OF TECHNOLOGY ABOUT COATED GLASS WITH MAGNETRON SPUTTERINGJ. VACUUM AND CRYOGENICS, 1999, 5(4): 229-232.

Citation:

CHEN Xiaodong. NEW ACHIEVEMENT IN THE FIELD OF TECHNOLOGY ABOUT COATED GLASS WITH MAGNETRON SPUTTERINGJ. VACUUM AND CRYOGENICS, 1999, 5(4): 229-232.

Abstract

In this paper,low-E and ITO films prepared by using the advantage of the twinmag and c-mag cathode are discussed and compared to planar magnetron cathode

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