FAN Chui-zhen, XIE Shu-ping, YANG De-quan. ANALYSIS ON DEPTH PROFILES OF ITO TRANSPARENT CONDUCTIVE FILMS BY XPS[J]. VACUUM AND CRYOGENICS, 2001, 7(1): 18-20.
Citation: FAN Chui-zhen, XIE Shu-ping, YANG De-quan. ANALYSIS ON DEPTH PROFILES OF ITO TRANSPARENT CONDUCTIVE FILMS BY XPS[J]. VACUUM AND CRYOGENICS, 2001, 7(1): 18-20.

ANALYSIS ON DEPTH PROFILES OF ITO TRANSPARENT CONDUCTIVE FILMS BY XPS

  • The properties of ITO transparent conductive films coated with SiO2 are introduced.The process of analysis on the depth profiles of the samples by XPS is described and the results are given.
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