THE APPLICATION OF OVPD EVAPORATION EQUIPMENT FOR OLED

JIANG Cui-ning, HUANG Qi-yao. THE APPLICATION OF OVPD EVAPORATION EQUIPMENT FOR OLED[J]. VACUUM AND CRYOGENICS, 2007, 13(3): 142-144,150.

Citation:

JIANG Cui-ning, HUANG Qi-yao. THE APPLICATION OF OVPD EVAPORATION EQUIPMENT FOR OLED[J]. VACUUM AND CRYOGENICS, 2007, 13(3): 142-144,150.

Citation:

JIANG Cui-ning, HUANG Qi-yao. THE APPLICATION OF OVPD EVAPORATION EQUIPMENT FOR OLED[J]. VACUUM AND CRYOGENICS, 2007, 13(3): 142-144,150.

Abstract

The application of OVPD（Organic Vapor Phase Deposition） technique in evaporation equipment for OLED（Organic Light-Emitting Diode） was introduced.The experiment equipment was manufactured,to approve its feasibility and controllability.Compared with conventional evaporation,OVPD has the following advantages: high utilization of organic material,good uniformity of film thickness,larger substrate etc.This technique established the process foundation for the OLED yield equipments.

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